Self-organization of quasi-equilibrium stationary condensation in accumulative ion-plasma devices

摘要

We consider both theoretically and experimentally self-organization processof quasi-equilibrium steady-state condensation of sputtered substance inaccumulative ion-plasma devices. The self-organization effect is shown to becaused by self-consistent variations of the condensate temperature and thesupersaturation of depositing atoms. On the basis of the phase-plane method, wefind two different types of the self-organization process to be possible.Experimental data related to aluminum condensates are discussed to confirmself-organization nature of quasi-equilibrium steady-state condensationprocess.